Handbook of Silicon Based MEMS Materials and Technologies
| By: | Lindroos, Veikko; Motooka, Teruaki; Franssila, Sami; Paulasto-Krockel, Mervi; Tilli, Markku; Airaksi |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780323299657 |
| eText ISBN: | 9780323312233 |
| Edition: | 2 |
| Format: | Reflowable |
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